On the applicability of Sato’s equation to Capacitative RF Sheaths

نویسندگان

  • J. Balakrishnan
  • G. R. Nagabhushana
چکیده

We show that the time dependent version of Sato’s equation, when applied to capacitative rf sheaths is no longer independent of the electric field of the space charge, and discuss the use of the equation for a specific sheath model.

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تاریخ انتشار 2003